LEAPâ„¢ is a portfolio of liquid, organometallic precursors packaged in high purity containers for advanced semiconductor manufacturing processes such as atomic layer deposition (ALD) and metal-organic chemical vapor deposition (MOCVD).



Advanced precursors for ALD & MOCVD



 Process  Element / Precursor  Application
Metal deposition Al - ALPIS
Cu - MABOCu
 Interconnect, Flash plug
Metal oxide, laminate film deposition

Zr - TEMAZr
Hf -TEMAHf 

Al - TMA
Si - TDMAS

 High-k gate dielectric, High-k capacitance dielectric
Titanium
Tantalum
 Ti - TDMATi, TEMATi
Ta - TBTEMT
 		 Diffusion Barrier, Metal Gate
Metal deposition Ni - MABONi
Co - CCTBA		 Contacts, Catalyst for carbon nanomaterials
Si Si - TDMAS LT Si oxide or nitride, High-k interface layer



Flex-ALDâ„¢ Advanced Precursor Formulations



LEAPâ„¢ includes our novel Flex-ALDâ„¢ Advanced Precursor Formulations which broaden the materials choices for ALD, particularly for metals where few suitable ALD precursors are available. Flex-ALDâ„¢ unique formulations are designed to address cost, stability and process issues with known ALD precursors. End user costs are decreased through better precursor utilization and the use of solvent based formulations.



 Process  Target Thin Film
High-k Applications

 

Al2O3 (aluminum oxide)

HfO2 (hafnium oxide)

La2O3 (lanthanum oxide)

SrO (strontium oxide)
Metal La (lanthanum) doping
Ru (ruthenium)
Ni (nickel)



Benefits of using Flex-ALDâ„¢



  • Improved process stability due to the stable and consistent, room temperature delivery of low-volatility precursors without decomposition or condensation
  • Higher precursor utilization compared to traditional ALD precursors and methods
  • Purer films without carbon and other impurities
  • Excellent process control through closed loop dosing



Materials Experience



All LEAPâ„¢ precursors are manufactured to rigorous standards and clean room packaged in expertly prepared canisters to meet the requirements of your most demanding applications.

Our applications experts can work with you to characterize materials for your application in our world class development lab.

Our global supply chain ensures that the materials are where they need to be when they are needed.