Typical gas and chemical requirements for thin film and crystalline Si manufacture.
Exact requirements will vary depending on the process.
Click on the highlighted product name to download the datasheet.
For more information please contact your nearest sales office, or email us at electronicsinfo@linde.com
| Product | Typical Grade | Typical Package (<200MW) | Typical Package (>200MW) |
| Silane (SiH4) | Electronic | Cylinder bundle / ISO module (6000kg) | ISO module (6000kg) |
| Nitrogen trifluoride (NF3) * | Technical | Cylinder bundle / ISO module (8000kg) | ISO module (8000kg) |
| Fluorine | Electronic | On-site plant | On-site plant |
| Sulphur hexafluoride (SF6) * | Technical | Cylinder | N/A |
| Nitrogen (N2) | Electronic | Liquid tank / on-site plant | On-site plant |
| Hydrogen (H2) | Electronic | Tube trailer**/ Liquid tank / On-site plant/pressure tank | On-site plant |
| Helium (He) | Technical | Pressure tank/Tube trailer** | Pressure tank/Tuber trailer** |
| Trimethylyboron (TMB) mixtures | Electronic | Cylinder | Cylinder |
| Phosphine (PH3) mixtures | Electronic | Cylinder | Cylinder bundle |
| Diborane (B2H6) mixtures | Electronic | Cylinder | Cylinder |
| Methane (CH4) | Technical | Cylinder | Cylinder |
| Argon (Ar) | Electronic | Cylinder bundle / Liquid tank | Liquid tank |
| Oxygen (O2) | Technical | Cylinder/Liquid tank | Cylinder /Liquid tank |
| Diethylzinc (DEZ) | Electronic | Drum / ISO module (20,000kg) | Drum /Tank/ISO module |
| Disilane (Si2H6) | Electronic | Cylinder | Cylinder |
| Trichlorosilane (SiHCl3) | Solar Grade | Drum/ISO module (10000-20000kg) | Drum/ISO module |
| Tetrachlorosilane (SiCl4) | Solar Grade | Drum/ISO module | Drum/ISO module |
| * PECVD chamber clean gas – Linde can advise on the most appropriate choice for your process | |||
| ** Tube trailers can contain up to 3,000 m3 of H2 and 5,000 m3 of He | |||
| Product | Typical Grade | Typical Package (<500MW) | Typical Package (>500MW) |
| Silane (SiH4) | Electronic | Cylinder / Cylinder bundle | ISO module (6000kg) |
| Ammonia (NH3) | Electronic | Tonne tank | ISO module (6000kg) |
| Tetrafluoromethane (CF4) | Electronic | Cylinder / Cylinder bundle | MCP (330kg) |
| Nitrous Oxide (N20) | Electronic | Tonne tank | Tonne tank |
| Nitrogen (N2) | Electronic | Liquid tank | On-site generator |
| Oxygen (O2) | Electronic | Cylinder bundle / Liquid tanks | Liquid tank |
| Argon (Ar) | Electronic | Liquid tank | Liquid tank |
| Hydrogen (H2) | Electronic | Cylinder bundle | Liquid tank |
| Acetic Acid (CH3COOH) | <100 ppb * | 200L drum / 1m3 tote | 200L drum / 1m3 tote |
| Ammonium Hydroxide (NH4OH) | <50 ppb* | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Buffered Oxide Etchants (NH4F:HF) | <50 ppb* | 200L drum / 1m3 tote | 200L drum / 1m3 tote |
| Ethanol (C2H5OH) | <10 ppb* | 200L drum / 1m3 tote | 1m3 tote / ISO tank** |
| Hydrochloric acid (HCI) | <10 ppb * | 200L drum / 1m3 tote | 1m3 tote / ISO tank** |
| Hydrogen Peroxide (H202) | <10 ppb * | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Hydrofluoric acid (HF) | <10 ppb* | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Isopropyl alcohol (C3H8O) | <10 ppb * | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Potassium Hydroxide (KOH) | < 5 ppm * | 200L drum / 1m3 tote / ISO tank** | 1m3 tote / ISO tank ** |
| Nitric acid (HNO3) | <50 ppb * | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Phosphoric acid (H3PO4) | <100 ppb * | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Sulfuric acid (H2SO4) | <50 ppb* | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| Sodium Hydroxide (NaOH) | <50 ppb* | 200L drum / 1m3 tote / ISO tank** | 11m3 tote / ISO tank ** |
| Custom Product Mixes Available | per specification | 200L drum / 1m3 tote | 1m3 tote / ISO tank ** |
| * Specification - max. impurity level per element analysed | |||
| ** ISO tank contains between 6,000 -17,000 litres of chemical | |||
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